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Organic Device Application
Aiming at total solution for organic device research.
Organic vacuum deposition system
Sublimation purification equipment
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P-100 (quartz tube diameter φ33,φ45
Completely dry pumping system
Special designed heater mechanism with gentle slope
Temperature ramp monitoring is always available
Sublimation process can be monitored.
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Useful items
Carrier box 
Carrier box is a container designed to place
substrate in the glove box and take
substrate within it out of the glove box. |
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Measurement chamber 
Light can be taken in and out by putting the device in vacuum.
We can manufacture it according to your desired specifications.
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Sputtering System
We manufacture and sell sputtering system of various structures from stand-alone
to multi-chamber system connected with vacuum evaporator. |
Vacuum Prober
Prober with carrier box
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It is used to measure the device characteristics by
moving the probe precisely in vacuum. By combining
with a carrier box, it becomes possible to measure
the substrate after completion of film formation
without exposing it to air.
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General purpose high temperature heating mechanism
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It is possible to control substrate high temperature heating during film formation by installing it in evaporation system , sputtering system, etc.
Useful for evaluation of crystallinity, arrangement, modification, etc.
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Specifications
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Specification |
Remarks |
Heating temperature |
～600℃ |
Temperature monitor value |
Effective heating area |
About40mm×40mm |
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Heater material |
Tungsten |
With a quartz plate shield |
Heater capacity |
20V,20A |
Approximately 10V-11A at 500℃ |
Temperature monitor |
K type thermocouple |
Type changeable |
Usage environment |
Vacuum (less than 7×10-2Pa） |
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Option：～900℃specification / Various susceptors / Substrate trays / etc
Dimension
 General purpose high temperature heating mechanism PDF catalog |
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Inquiries by phone
Business Hours/9:00~18:00
Inquiries by mail
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Vacuum Equipment
