ALS Technology Co., Ltd.

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Glove Box Sagami


High performance and advanced features at a reasonable price!
sagami

Features
●Reasonable Price
Achieved cost reduction through major design changes

●Newly Developed Compact Gas Circulation Purifier
① Catalyst regeneration function (copper catalyst)
② Internal box environment
 Oxygen concentration ≤5PPM / Dew point ≤5PPM (-64°C or lower)
 Complex valve switching during regeneration is PLC-automated

●Safety for N2 Gas
①Automatic shut-off of main valve in case of N2 gas leak
②Automatic control (APC) of internal N2 pressure

●Reduced Running Costs
Refining agent replacement can be performed by the customer
●Special Coating on Front Resin Panel Interior

Enhanced solvent resistance and static prevention achieved
●Expandability
Compatible with our vacuum deposition equipment
Also compatible with third-party vacuum equipment meeting the following dimensions
(Substrate transport level: 1242mm × Flange: Φ265mm)

● Options
VOC (Volatile Organic Compound) sensors, etc.

Basic Specifications

  2 glove sizes Gas-Circulating Purification Glovebox
Dimensions Dimensions
Material
Front Window (Single-sided)
Antechamber
Glove Box
Internal 100V Outlet
W780mm × D650mm × H1707mm (excluding protrusions) SUS304 Polycarbonate resin
Size: Inner diameter Φ254mm × Length 293mm
Φ8-inch standard × 2 pieces, butyl rubber
Power supply to customer equipment
Trace Concentration Meter Oxygen Concentration Meter Model 1
Moisture Concentration Model 1
VOC Concentration Meter
5 ppm or less
5 ppm or less (dew point approx. -64°C or lower)
Optional (usable in an inert gas atmosphere)
Purification mechanism Gas circulation system
Purification agent for oxygen removal
Purification agent control for moisture and solvent removal
Forced circulation via blower
Copper catalyst
Porous filter
Automatic control via PLC
Gas Safety Design Internal Pressure Automatic Control
N2 Gas Leak Detection Mechanism
PLC-Based Automatic Control
Detects gas flow and halts N2 introduction
Operation Touch Panel Input/Display Purified Solution Playback Operation
Concentration Display
Interlock Display, etc.
Power Requirements Electricity 200V single-phase / 100V
Compressed Air
N2 gas
Mix gas (3-5% hydrogen)
(100V for customer equipment)
For valve operation
For gas circulation
For copper catalyst regeneration

Contact Us


For inquiries or questions, please feel free to contact us using the form below.