Vacuum Equipment Business

E-200 Series Vacuum Deposition Equipment
The E-200 series offers numerous configuration options. The transport system utilizes our proprietary rack-and-pinion mechanism, ensuring high positioning accuracy.

Organic Evaporation Equipment
We aim to provide total solutions for organic-related processes.

Sublimation Purification System P-100
(Quartz tube diameter φ33, φ45 specifications)
Fully dry exhaust system
Specially designed heater mechanism with gentle slope
Continuous monitoring of temperature gradient possible
Observation of purification status possible

Useful Products

Career Box
The Career Box enables the transfer of substrates within a glove box by placing them inside the box and then removing them from the glove box for transport.

Measurement Chamber
Enables light transmission into and out of devices placed in a vacuum environment.
Custom manufacturing available to meet customer specifications.

Sputtering Equipment


We manufacture and sell sputtering equipment in various configurations, ranging from standalone units to multi-chamber systems connected to vapor deposition machines.

Vacuum Prober
Used to precisely move prober needles within a vacuum environment to measure device characteristics.
Combined with a carrier box, it enables measurement of substrates after film deposition without exposing them to air.

General-purpose, High-temperature Heating Mechanism
Used to precisely move the prober needle within a vacuum environment for measuring device characteristics.
When combined with a carrier box, it enables measurement of substrates after film deposition without exposing them to air.

Specifications

Item	Content	Notes
heating temperature	～600℃	Temperature monitor value
Effective heating range	Approximately 40mm × 40mm
Heater material	Tungsten	Quartz plate shield included
Heater capacity	20V,20A	Approximately 10V-11A at 500°C
Temperature Monitor	K type thermocouple　K thermocouple	Changeable type
Operating Environment	Vacuum (below 7×10⁻² Pa)
Options	～900℃ Specifications / Various Susceptors / Substrate Trays, etc.
Dimension Drawing

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